Determining the position during wafer handling

When handling wafers, exact and repeatable positioning is crucial. During the infeed of wafers, two optoCONTROL laser micrometers inspect the diameter and thus determine the horizontal position. Thanks to the high measuring rate and accuracy, these micrometers provide reliable information about the position. Depending on the position of the two micrometers relative to one another, different wafer diameters can be detected.

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optoCONTROL 2520

MICRO-EPSILON SENSOTEST AB
jakob.geisler@micro-epsilon.se
+46 8 564 733 80